Mechatronic Control and Modeling of a Piezoelectric Actuator

In this work, we present a detailed description of a mechatronic modeling and control of a piezoelectric actuator for a scanning tunneling microscopy (STM). Existing work on a piezoelectric actuator in mainly modeled with theoretical process. However, in this paper, we used the bond graph approach. Initially a Bond Graph model of the system is illustrated. The dynamic behavior of piezoelectric actuator and the feedback loop controlling the tip to sample distance is analyzed in detail, including parasitic effects by electrical perturbations. Furthermore, an electronic command has been analyzed and improved for the microscope scanner head; the performance of the system has been modeling by the bond graph methodology the global model is presented and discussed. Under excitation our model has been validated by simulation responses of the system. The simulation results indicate that our goal to optimize the control of piezoelectric motion designed for a scanning tunneling microscope can be realized by using the proposed method.