A Differential Probe with Integrated Balun for On-wafer Measurements in the WR-3.4 (220 – 330 GHz) Waveguide Band

This paper demonstrates the first differential on-wafer probe with integrated balun operating in the WR-3.4 (220 - 330 GHz) waveguide band. The probe employs integrated balun circuitry to convert the single-ended signal from the waveguide output of a VNA into differential stimuli at the on-wafer transmission line output. The design approach, fabrication method and measured results are described in this paper.