New Era of Device Science

Micro and nanofabrication processes have significant impact on the recent development of semiconductor integrated circuits, micro/nano-electromechanical systems (MEMS/NEMS), biosensors, and optoelectronic devices. In addition, several semiconductor wafer bonding and two point five-dimensional (2.5D)/three-dimensional (3D) integration technologies have been proposed in order to develop advanced electronic device applications. On the other hand, organic electronic devices, which consist of organic semiconducting materials instead of traditional inorganic materials such as silicon, have attracted attention for applications in flexible devices, wearable devices, and others. In particular, organic light-emitting diodes (OLEDs) have recently reached the stage of commercialization of new light sources and flat-panel displays. Our research group have focused on studies on novel inorganic and organic electronic devices. This presentation provides a brief overview of the authors' own recent researches on nanofabrications, homogeneous and heterogeneous bonding technologies, and functional microdevices. We especially discuss our organic electroluminescent device applications such as the nano-OLEDs and the microfluidic OLEDs.