Modeling of birefringence properties in SiOxNy film rib optical waveguides

In this paper, a contribution to the study and dimensioning of a ridge waveguide based on SiOxNy material was carried out. The SiO
_x
N
_y
guide can be prepared by the PECVD technique using the following reagents: N
₂
O, NH
₃
and SiH
₄
. The simulation results show that the transverse electrical and transverse magnetic components are quite confined and the optical losses are minimal. We have also shown that the birefringence of the effective index of the fundamental mode vanishes at two points as a function of the width of the guide. Therefore, the waveguide is insensitive to polarization whatever their transverse electric or transverse magnetic type. This study allowed us to optimize the dimensions of the ridge waveguide to have a waveguide with minimal losses propagation.