RF MEMS Tunable Capacitor for Voltage-Controlled Oscillator Application in C-Band Range

An RF MEMS tunable capacitor utilized in a Voltage-Controlled Oscillator (VCO) circuit is presented throughout this work. The RF MEMS tunable capacitor is designed to have dielectric material separating the plates as part of a movable membrane. Hence, the fabrication requires merely three lithography steps. By limiting electrostatic actuation voltage up to 90 V only, the capacitance tuning ratio is 2.24. The RF MEMS capacitor on glass substrate is integrated into a VCO circuit on microwave substrate via bond wires.