X-band and K-band lumped Wilkinson power dividers with a micromachined technology

With a novel micromachined technology, Wilkinson power dividers have been realized by lumped components such as spiral inductors, metal-insulator-metal (MIM) capacitors and thin-film resistors (TFRs). For the first time, X-band and K-band power dividers with low loss (0.6 dB) and wide bandwidth (25% bandwidth for 15 dB return loss) have been demonstrated in this work. Due to the process compatibility, this technology is suitable for Si-based MMIC applications.