A Mode-Selectable Beam Resonator Based on Sectionalized Electrodes

In this paper, a mode-selectable beam resonator based on sectionalized electrodes is presented. By configuring the location and number of driving and sensing electrodes, the vibration mode and the resonant frequency can be changed. Therefore, the proposed resonator can provide wide-frequency tuning. Under vacuum level of 2 Pa, the resonant frequencies of the 1
^st
, 2
^nd
and 3
^rd
modes are 67 kHz, 211 kHz and 431 kHz respectively. Nonlinear behavior of higher modes in this clamped-clamped beam resonator at different driving conditions is presented. The resonator was fabricated in an SOI (silicon on insulator) wafer and tested via open-loop spectral response measurement. The mode selectable resonator can be applied to resonant sensors with tunable sensitivity, and applications which need to work at higher frequencies.