Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters

We demonstrate sub-THz waveguides, low-pass and band-pass micromachined filters at frequency range 225-325 GHz. Impact of fabrication processes and electrical interfaces with external waveguides on parameters of filters are studied and analyzed. Results obtained are applicable also for other types of devices based on micromachining waveguides.