Robust Control of a Dimensionless Dual Axis MEMS Vibratory Gyroscope- A Sliding Mode Approach

This paper proposes a control using sliding mode technique for the tracking control of Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscope. This control strategy relies on the force re-balance control methodology. The control based on LQ minimisation methodology is robust to parameter variations and ensures convergence of position tracking in the presence of fabrication imperfections, noise etc. The stability is analyzed and the tracking ability is demonstrated in the simulation study. The controller design is done for the non dimensional model of the gyroscope which makes it possible to adapt for any gyroscope design.