Construction of Pulse Laser Deposition System for Fabrication of Magnetic Multilayers

Magnetic multilayer has been the source of wide spread applications such as magnetic random access memory and rare-metal-free permanent magnet [1], [2]. The surface and interface structure play a key role in the emergence of curious physical property. Pulse laser deposition (PLD) is a powerful technique to fabricate thinfilms and multilayers [3]. It has ultrahigh instantaneous deposition rate by using laser ablation of target materials, and it show almost ideal layer-by-layer morphology with high nucleation density. Morphology of deposited surface is smoother than traditional molecular beam epitaxy. PLD provides great opportunities to design artificial multilayer structure that show promising physical properties.