Tunable Metamaterial IR Emitter by Using MEMS Microheater

We proposed an effective metamaterial infrared (IR) emitter by using MEMS microheater with different pattern density. A highest heating efficiency of MEMS microheater is under the pattern density of 49%. The metamaterial is composed of π-shape nanostructures on the surface of MEMS microheater to form a metamaterial IR emitter. By changing gap width of π-shape metamaterial, the emissivity of IR emitter is blue shift and enhances its emissivity. The emissivity of metamaterial IR emitter is 0.94 at wavelength of 5 μm. Such design is able to exhibit a narrowband wavelength in IR wavelength range.