Reflectance Analysis of the Otto Chip Using an Automated Reflectometer

This paper reports an experimental study focused on the characterization of the Otto chip device. These devices are structures sealed with a glass window, having a gold film, which is separated from the window surface by a well-defined gap. The gap is designed for the surface plasmon resonance effect. In this study, gap profiles were scanned by optical reflectometry. A preliminary analysis of reflectance curve patterns allows mapping the topography of the different regions of the chip. The results of the study can be used to optimize the manufacturing process of this type of structure.