Seebeck Effect Imaging to Improve Short Defect Localization

Seebeck effect usually comes with OBIRCH analysis. Thermal variation will be generated when the IR laser irradiates on IC. The thermal gradient will induce small electrical potential gradient on different metals, like metal bridge defect. So Seebeck Effect Imaging is an important supplymentary method when doing OBIRCH analysis. Here we used Seebeck Effect Imaging to improve short defect localization on 45nm Cu metal AUTO products.