Design and simulation of high sensitive paddle microcantilever sensor for biosensing

The primary objective of this paper is to demonstrate the high sensitivity microcantilever based biosensor used in biomedical diagnostics. This paper presents trapezoidal paddle microcantilever designs which gives better deflection and higher sensitivity for biosensing applications. The proposed sensor design provides the free end deflection which is nearly two times as the existing trapezoidal beam with the same area. Comsol multiphysics software is used to design and analyze the deflection of the proposed microcantilever sensors. This device plays an important application in the identification of disease causing particles. The main advantages of MEMS based sensors are specificity, simplicity, and high sensitivity, potential ability for real-time and on-site analysis coupled with the high speed and low cost.