The first self-priming and bi-directional valve-less diffuser micropump for both liquid and gas

A new micropump design was fabricated to make a qualitative study on the reliability of micro diffuser pumps. A novel two-level pump chamber geometry enables both gas and liquid pumping. The micropumps are fully self-priming and insensitive to cavitation and gas bubbles in the liquid. Changing the driving frequency enables bi-directional pumping for both liquid and gas, i.e. both forward and reverse pumping. The pumps consist of a silicon-glass stack and are fabricated with a new process involving three sequential deep RIE steps. A new and simple melt-on method for conveniently fixing external tubes to the device was developed. Design, fabrication and first experimental results are described and discussed.