Reusable, flexible, and low cost parylene-C/CR shadow mask for micropatterning on arbitrary surfaces

This paper reports a reusable, flexible and low cost parylene-C/Cr shadow mask for fabricating diverse microscale patterns on arbitrary surfaces. The smallest feature size of the fabricated patterns can reach 3 μm and the mask can be reused for more than 6 times with good integrity and high accuracy. Compared to state of the art, this shadow mask has smaller feature size and thickness, longer usage time and better feature transfer fidelity.