Development of MEMS-accelerometer capacitive sensitive element with a variable acceleration range up to 20000g

One of the problems of MEMS-accelerometers is a small nomenclature of ranges for very large accelerations (about 20000g and more). This is explained by the fact that the development and manufacturing of sensors for such ranges is very difficult task. Construction of the sensitive element have to be soft, capable of measuring accelerations from units (g) to tens of thousands (g), and at the same time rigid enough to provide resistance to long-term shock impacts of high intensity, which is the main problem in the development of MEMS-accelerometers for very large ranges. In addition, the application field of such accelerometers is quite specific, therefore sensitive elements should be resistant to various vibrations, as well as high temperatures.