Analysis of multilayered SAW based gas sensor

In this paper, we present the comparison of single-layered and multi-layered Surface Acoustic Waves based sensor for detection of Di-Chloromethane (DCM) gas. Finite Element Analysis has been carried to detect the behaviour of sensor when exposed to DCM. Two structures PIB/LiTaO
₃
and PIB/Al
₂
O
₃
/LiTaO
₃
are simulated in COMSOL Multiphysics. Multi-layered SAW based sensor shows high sensitivity comparatively with resonant frequency of 1.31 GHz approximately towards DCM. Also, the effect of thickness of spacer layer and atmospheric conditions on frequency shift is studied.