Non-mechanical beam scanner integrated VCSEL for solid state LiDAR

We demonstrate the monolithic integration of a non-mechanical beam scanner and VCSEL for solid state LiDAR. A beam deflection is realized by using the electro-thermally tunable VCSEL coupled to a slow light SOA with a large angular dispersion. We obtained the maximum deflection angle of over 13° and a narrow divergence of below 0.15°.