An SU-8 micro-tweezer based on the chevron electro-thermal actuators with a large in-plane displacement

This paper presents the design, simulation, fabrication, characterization and displacement measurements of a micro-tweezer manufactured using the biocompatible polymer, SU-8. The micro-tweezer is electro-thermally actuated and the design is based on V-shaped configurations. The measurements show a maximum in-plane opening of the micro-tweezer tips of 70.5 μm for 0.74 V applied while the out-of-plane deflection remain under 0.1 μm during actuation.