FEM analysis of a 3D model of a capacitive surface-micromachined accelerometer

In this paper we present the analysis of a 3D model of a surface-micromachined accelerometer. It allows us to define basic mechanical parameters, which give us information about mechanical properties of the modelled sensor. The analysis has been performed in COMSOL Multiphysics software. We used the Finite Element Method (FEM) for the analysis of the 3D structure. We analysed the behaviour of our sensor for changing the acceleration up to 8g. We also checked the eigenfrequencies of the sensor in order to define its parameters.