Doping study of superconductivity in YBCO films by ion implantation

We present the results of doping by ion implantation in YBCO films with 5 different ions (Ca, Na, Mg, Be, Li). Ion selection is based on the difference of ionic radii and heat of formation value. Ionic radii plays a critical role to crystal damage in the implantation process. Ni ions were implanted to YBCO films with different doses so that the resistance of the implanted film was varied. Different values of resistance of the Ni implanted structures were applied to the fabrication of chip resistors.