(Invited) Future perspectives of TCAD in the industry

For the better part of the last 20 years, simulation of semiconductor processes and devices had been the main focus in modeling planar CMOS transistors. The introduction of FinFETs in 2010, along with the increasing use of non-Si materials added much complexity and cost in technology development. With multiple device architectures and material options to consider, TCAD has evolved from focusing primarily on process and device simulation of single devices to multiscale simulation of multiple devices including novel materials to analyze variability and technology impact on design. In this paper, we offer our perspectives of TCAD for its expanded role in pathfinding for early selection of technology choices and generation of pre-wafer Process Design Kit (PDK).