Folding differential capacitive accelerometer made of LTCC

Low Temperature Co-firing Ceramic (LTCC) technology is the mainstream of passive integrated packaging/assembly integration technology because of the high temperature and bad environment resistance. This paper reports the folding differential capacitive accelerometer based on LTCC. This device consists of covers top and down, a round box and sensitive mass block which fit together by four elastic cantilever beams. As we know, folding is the most ideal structure among the single direction accelerometers; According to the ANSYS simulation results, it has ideal modal response and frequency response so that the mechanism design is reasonable; The device adopts the round box and cover the body up and down, we use the auxiliary bonding way to solve the technical problems; The chip MS3110 with detection circuit transform from capacitance signal to voltage. This paper discusses the design and technology, detecting circuit and performance testing of micro mechanical LTCC accelerometer. According to the result of index head test, the device presents excellent linearity between -1 to +1 acceleration of gravity under static condition, and the sensitivity is about 25mv/g.