Quality control for ultrafiltration of ultrapure water production for high end semiconductor manufacturing

Ultrafiltration is applied to remove particles, colloids and large macromolecules from ultrapure water for semiconductor device manufacturing. Early detection of leaks, pinholes and fiber breaks in membrane modules is an essential prerequisite for this ultimate task and a first step for defect free manufacturing. Particle monitoring alone is not sufficient. Periodic pressure-hold testing enables much higher sensitivity and is an indispensable complementary measure for preventive maintenance.