Scaling of Vertical InAs–GaSb Nanowire Tunneling Field-Effect Transistors on Si

We demonstrate improved performance due to enhanced electrostatic control achieved by diameter scaling and gate placement in vertical InAs-GaSb tunneling field-effect transistors integrated on Si substrates. The best subthreshold swing, 68 mV/decade at V
_DS
= 0.3 V, was achieved for a device with 20-nm InAs diameter. The ON-current for the same device was 35 μA/μm at V
_GS
= 0.5 V and V
_DS
= 0.5 V. The fabrication technique used allow downscaling of the InAs diameter down to 11 nm with a flexible gate placement.