Multi-layer corrugated terahertz horn antenna based on MEMS technology

A multi-layer corrugated circular-aperture terahertz (THz) horn antenna based on MEMS (Micro-electromechanical System) technology is presented in this paper. The proposed antenna reveals bandwidth for return loss below -13 dB from 470 GHz to 530 GHz. The radiation pattern exhibits symmetric beam and very low cross-polarization. The peak gain varies from 18.9 dBi to 20.2 dBi within the frequency band 470-530 GHz. Moreover, the antenna shows good coupling efficiency to Gaussian beam with gaussicity up to 96% at 500 GHz.