An integrated reconfigurable tuner in 45nm CMOS SOI technology

An integrated reconfigurable tuner based on a 4-mm long coplanar waveguide transmission line (CPW) loaded periodically with switched capacitors is demonstrated in a standard 45nm CMOS Silicon on insulator (SOI) technology. The tuner is designed with 10 switchable capacitors controlled by a series-in parallel-out shift register, that allows on-the-fly programming, leading to a large Smith chart coverage at 2 GHz with 1024 unique impedance points. The total area of the tuner is 4.4 x0.42 mm
²
including DC and RF pads.