Investigation on the flow properties of BPSG films

The effects of various borophosphosilicate glass (BPSG) film postgrowth treatments on the film after-flow angles have been explored with ESCA (electron spectroscopy for chemical analysis) and FTIR (Fourier transform infrared spectroscopy). The experimental results show that longer delay times result in larger after-flow angles. Films after deionized water rinse give rise to a reentrant angle at the film-substrate interface. Different flow ambients also result in slightly different after-flow angles. ESCA and FTIR spectra show that the after-flow angle changes are due to the chemical changes on the film surface. Proper film postgrowth treatments are proposed to obtain proper after-flow angles to avoid discontinuity in metal layer deposition.<
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