A high-order terminal iterative learning control scheme [RTP-CVD application]

A high-order terminal iterative learning control (ILC) scheme is proposed where only the terminal output tracking error instead of the entire output trajectory tracking error is used to update the control profile. A convergence condition is obtained for a class of uncertain discrete-time time-varying linear systems. An application example is presented, by simulation, for a rapid thermal processing chemical vapor deposition (RT-PCVD) thickness control problem in the wafer fab industry.