W-Band Micro-Fabricated Coaxially-Fed Frequency Scanned Slot Arrays

In this communication we describe a frequency scanning slot array in μcoaxial technology operating from 87-102 GHz. The array achieves a 30° scanning angle over a 15 GHz bandwidth. The device is fabricated using the PolyStrata sequential copper deposition process, which guarantees low loss and small size. A double-array prototype, with a gain of 14 dB at 94 GHz, is fabricated and tested.