A new 1 MHz-2 GHz permeance meter for metallic thin films

We have developed a permeance meter in the 1 MHz-2 GHz range using a shielded loop type pickup coil. The effect of grounding between drive coil and pickup coil was analyzed using time domain reflectometry (TDR). The grounding increased the output voltage and eliminated the multiple reflections in the drive coil. Using the grounding, magnetic thin film permeance can be measured accurately over a wide frequency range. The complex permeance is shown of a l /spl mu/m thick Co/sub 85/Nb/sub 12/Zr/sub 3/ film.