I. Introduction
A completely miniaturized and integrated system is expected to achieve the function of micro total analysis, low cost, reduced operation error, and higher throughput. Recently, the development of lab-on-a-chip (LOC) for medical researches, biochemical analyses, and clinical diagnoses has evoked great research interests. Both micropump and microvalve play important roles on LOC. They drive and control fluid to reaction zones on chip and profit measurement or inspection.