200 mm silicon wafer processing for large area strip detectors

We developed large silicon single-sided strip detectors made of 200 mm float-zone Si wafers. The single-sided silicon strip detectors have an effective active area of 156 cm
²
and 725 ¿m in thickness and were fully depleted. Basic performance was measured using Am-241 and Co-57 sources. The leakage current varied from strip to strip due to some contaminations during the processing.