Effect of Dummy fills on characteristics of passive devices in CMOS millimeter-wave circuits

This paper discusses issues of dummy fill in high frequency CMOS circuits. dummy fill is a small oating metal to suppress the metal thickness variation. In high frequency, eddy current induced in the dummy fills affect the electrical performance of passive devices. We introduce the effect on a transmission-line and a spiral inductor. We discuss which dummy fills have significant effect on the performance and show a design strategy of on-chip spiral inductor with dummy fills.