Development of SPDT-structured RF MEMS switch

Here, we propose a practical single pole double throw (SPDT)-structured radio frequency microelectromechanical system (RF MEMS) switch for RF applications. This SPDT switch has a very low insertion loss of 1.0 dB and a high isolation of 40 dB, up to 10 GHz. The fabricated switch is compact in size (5.2times3.0times1.8 mm
³
) with a Land Grid Array Package. The research and development of an RF MEMS switch has been ongoing in our laboratory for years, and we have achieved practical reliability by using a low vibration actuator against a natural frequency. We describe the correlation between contact reliability and the low vibration actuator, as well as the high frequency performance of our new SPDT switch.