A miniature DC-70 GHz SP4T switch in 0.13-µm CMOS

This paper presents a miniature DC-70 GHz single-pole four-throw (SP4T) built in a low-cost 0.13-mum CMOS process. The switch is based on a series-shunt design with input and output matching circuits. Deep n-well (also called triple-well) CMOS transistors are used to minimize the substrate coupling. Also, deep trench isolation is used between the different ports to minimize the port-to-port coupling. The SP4T results in a measured insertion loss of less than 3.5 dB up to 67 GHz with an isolation of greater than 25 dB. The measured port-to-port coupling is less than 28 dB up to 67 GHz. The measured P1dB and IIP3 are independent of frequency and are 9-10 dBm and 20-21 dBm, respectively. The active chip area is 0.24times0.23 mm
²
. To our knowledge, this work represents the widest bandwidth SP4T switch in any CMOS technology to-date.