Two-dimensional images of CF/sub 2/ density in CF/sub 4//Ar plasmas by laser-induced fluorescence in a GEC RF reference cell

Spatially resolved two-dimensional (2-D) maps of the relative CF/sub 2/ density in low-pressure CF/sub 4//Ar RF discharges, generated within a parallel-plate gaseous electronics conference (GEC) reference reactor, have been obtained using planar laser-induced fluorescence imaging (PLIF). The results illustrate the changes in CF/sub 2/ density and distribution in the central plane of the discharge region as flowrate is varied over 10-100 sccm at constant power and pressure, and as pressure is varied over 13.3-133.3 Pa at constant flowrate and power.