Laser ablation deposition of YIG films on semiconductor and amorphous substrates

Yttrium Iron Garnet (YIG) films were grown on single crystal silicon, Corning glass, single crystal MgO and quartz substrates using pulsed laser ablation techniques. Films were grown over a range of temperature, deposition rate, and oxygen partial-pressure conditions. Sample microwave magnetic properties were deduced using ferromagnetic resonance (FMR) measurements, with the sample magnetic properties also being measured. All films were polycrystalline, with as-grown films deposited at temperatures below 800/spl deg/C having a weak magnetization. Good magnetic and microwave magnetic properties were obtained after annealing the samples in atmosphere at temperatures above 720/spl deg/C. FMR linewidths of 55 Oe were measured on the annealed films on glass substrates. We believe that growth of thick films with these properties will be sufficient for many polycrystalline-based YIG devices.