Basic examination on simultaneous optimization of mechanism and control for high precision single axis stage and experimental verification

In this paper, simultaneous optimization of mechanism and control is discussed for a high precision stage. We pay attention to zeros of a continuous-time plant, and the relationship between a sensor and zero positions has been clarified. In addition, it has been shown that similar relations are provided in structural change of a plant. After the zero position desired for a control system is shown, the vibration suppression PTC (Perfect Tracking Control) is applied to the plant with that condition. Finally, the effectiveness of proposed methods are verified by a simulation and an experiment.