Integrated CMOS-MEMS technology and its applications

The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated complementary metal-oxide-semi-conductor-microelectromechanical systems (CMOS- MEMS). The prospect of this integration is also presented. A MEMS fingerprint sensor and a low-voltage radio frequency (RF) CMOS-MEMS switch are the case studies discussed. In conclusion, it is confirmed that the integrated CMOS-MEMS technology will pave the way for the More than Moore technology.