Online Management and Control System for growing of monocrystal semiconductor materials in multi-zone furnaces

The following article introduces OMaCS (Online Management and Control System), a multiple client single server software system for the control of crystal growth systems (e.g. multi-zone furnaces). OMaCS has especially been tuned to the needs of the process thus allowing quick and efficient co-operating of different user groups. The software is a flexible system applicable for different types of growing plants. This facilitates the integration of new or existing furnaces. The design of multi-user systems, especially of systems with Internet connection, requires suitable security mechanisms. OMaCS offers basic features to protect the furnace and with it the process against unintentional access.