Preparation of Spinel Ferrite Thin Films by Plasma Assisted MO-CVD

Thin films of spinel ferrite, Co
_x
Fe
_3-x
O
₄
(0≤×≤1.0), were prepared by plasma-assisted MO-CVD from mixed vapor containing Fe(C
₅
H
₇
O
₂
)
₃
, Co(C
₅
H
₇
O
₂
)
₃
and O
₂
. X-ray diffraction patterns and SEM images of the films revealed a columnar structure with a ≪100≫ preferred orientation, irrespective of the Co content x, and the diameters of columns dropped from 1500 Å to 400 Å as the Co content x was increased from 0 to 1.00. Film CEMS spectra and B-H loops indicated that the magnetic spin direction in film without Co was random, but tended to become oriented perpendicular to the film surface with increasing Co content.