MEMS based nano crystalline zinc oxide methane gas sensors

Detection and estimation of methane gas for continuous environmental monitoring is of growing importance for prevention of explosions inside coalmines and asphyxiations in cramped localities and green house warning. For continuous monitoring in field locations, low power and sometimes low temperature operation of methane sensors are essential. This could be achieved by employing MEMS structure for low power operations and nanocrystalline Zinc oxide for low temperature activation. The present communication reports the design, fabrication, characterization and laboratory testing of MEMS based nano ZnO methane sensors. Power consumption range 100-150 mW and temperature range of 150-200degC have been achieved with moderately high (Gt50%) sensitivity and response time (les15 sec). Further improvement is expected through optimization.