Novel doping technology for a 1nm NiSi/Si junction with dipoles comforting Schottky (DCS) barrier

This paper studies the Schottky barrier height (SBH) modulation effect induced by dipoles, which several types of impurity atoms generate at the nickel silicide (NiSi)/silicon (Si) interface, through both first-principles calculations and experimental methods. Based on these understandings, we discuss their applicability to the DCS junction, leading to a principle for choosing dopants.