Determination of local composition in Co-Cr films deposited at different substrate temperatures

Thin Co-Cr films deposited on polyester substrates at different temperatures have been investigated by high-spatial-resolution X-ray microanalysis. Films deposited on a substrate whose initial temperature was 90 degrees C had a columnar structure with distinct narrow boundaries whose composition, Co/sub 71/Cr/sub 29/, differed appreciably from that of the surrounding columns, Co/sub 77/Cr/sub 23/. By contrast, films deposited on a substrate at 30 degrees C had a columnar structure with less clearly defined boundaries whose composition did not differ significantly from that of the columns. These results help explain previously investigated magnetic properties of the films.<
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