Microfabricated free-standing epitaxial Y-Ba-Cu-O microbolometers on silicon substrates

The fabrication sequence of Y-Ba-Cu-O air-bridge microbolometers on silicon substrates is described. A comparison of air-bridge microbolometers and bolometers on bulk silicon is given. The bolometric response of the bolometers is studied with chopped IR illumination at a wavelength of 1.3 /spl mu/m. The influence of the fabrication technique on the bolometer performance is discussed. Measurements of the voltage noise in free-standing Y-Ba-Cu-O microbolometers are presented and compared with the predicted values.<
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