High frequency surface acoustic wave filter using ZnO/diamond/Si structure

The surface acoustic wave (SAW) characteristics in a ZnO/diamond/Si structure are studied. Using theoretical calculations, effective film thicknesses of ZnO and diamond providing high phase velocity and K2 are found. Based on these data, a SAW filter of a ZnO/diamond/Si structure is fabricated. It is shown that large velocities can be obtained as expected from theoretical calculation and that a high-frequency SAW filter can be fabricated with much larger scale interdigital transducers (IDTs) than those in conventional material systems. The results indicate that this material system will find broad application in high-frequency SAW filters and resonators.<
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