Synthesis and processing of thin films in the Tl-Ca-Ba-Cu-O system

A number of key processing issues have been identified for the film growth and the subsequent processing of thin films in the Tl-Ca-Ba-Cu-O system. The interrelationship between the precursor and the typical ex-situ process schemes is examined. An aqueous photolithographic process technology for submicron device fabrication without significant degradation of the surface resistance and the use of rapid thermal processing for contact anneals are discussed.<
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