SXLS phase II vacuum system

The Phase II design of the Superconducting X-ray Lithography Source (SXLS) consists of replacing the two room-temperature 180 degrees C dipole magnets of Phase I with superconducting magnets. However, even though superconducting magnets are used, the vacuum chambers within them will operate at room temperature. The chambers are constructed as weldments and are made of INCONEL-625. They are bakeable to 150 degrees C in situ and incorporate nine photon beam ports. Each has built-in distributed sputter-ion pumps, (DIP), nonevaporable getter pumps, beam position monitors, and ion clearing electrodes. R&D is underway to optimize the DIP, which must operate at 3.86 T, and to develop a low photo yield coating or treatment for the internal surface of the chambers.<
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